%0 Journal Article %J Proceedings - Electrochemical Society %D 1994 %T Fabrication of microstructures for use in biological and optical applications %A Denton, D. D. %A Thiel, A. J. %A L. M. Smith %A Bajikar, S. %A White, V. %A Ghodssi, R. %A Fish, G. %A McCaughan, L. %B Proceedings - Electrochemical Society %V 94-14 %P 103-14 %@ 0161-6374 %G English